準分子雷射產品
準分子雷射型號
Lambda Steel Series, LSX Series, LPX Series and Pro Type, COMPex Series
Excimer Laser System
Lambda Series
Lambda Steel Series
- LS670
- LS1000
- L1000
- L2000
- L3000
Excimer Laer System
Lambda SX / LSX Series
- LSX 200C
- LSX 315C
Excimer Laser System
LPX Series
COMPex Series
- LPX 100
- LPX 200 / Pro
- LPX 300 / Pro
- COMPex 100
- COMPex 200
準分子雷射維修技術服務
完整全雷射系統維修方案
Excimer Laser Gases
- Excimer Laser Gases for wavelength 308nm, 248nm, 193nm
- 308nm, HCL / Xe / Neon
- 248nm, KrF Gases, Mix gases M96H
- 193nm, ArF Gases, Mix gases M98H
Excimer Laser Optics
- Excimer Laser Laser Tube Windows
- Excimer Laser Annealing Windows
- Excimer Laser Optics
- Excimer Laser BDS / Beam delivery system
Excimer Laser Parts Repair Service
- Excimer Laser Tube Refurbishment
- HVPS High voltage power supply
- HVPS 802 Series, LC1202 Series
- HHT / KEBA KeTop C50 Repair
- Beam Shutter Repair
- GP CRYO Repair / Refurbishment
- Thyrtron Supply Power Module Repair
- Trigger Board Repair
RichEnergy Technology service and systems for Excimer Laser products, Excimer Laser system, Excimer Laser Applications