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準分子雷射產品

準分子雷射型號

​Lambda Steel Series, LSX Series, LPX Series and Pro Type, COMPex Series

Excimer Laser
Lambda Steel 670 / 1000
Lambda SX
Excimer Laser
LPX Pro
Excimer Laser

Excimer Laser System
Lambda Series
Lambda Steel Series

- LS670
- LS1000
- L1000
- L2000
- L3000

Excimer Laer System
Lambda SX / LSX Series

- LSX 200C
- LSX 315C

Excimer Laser System
LPX Series
COMPex Series

- LPX 100
- LPX 200 / Pro
- LPX 300 / Pro
- COMPex 100
- COMPex 200

​準分子雷射維修技術服務

完整全雷射系統維修方案

Excimer Laser Gases 
F2Ne, HCL, Xe, Kr, Neon
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Excimer Laser Gases

- Excimer Laser Gases for wavelength 308nm, 248nm, 193nm

- 308nm, HCL / Xe / Neon

- 248nm, KrF Gases, Mix gases M96H

- 193nm, ArF Gases, Mix gases M98H


Excimer Laser Optics

- Excimer Laser Laser Tube Windows
- Excimer Laser Annealing Windows
- Excimer Laser Optics
- Excimer Laser BDS / Beam delivery system

Excimer Laser Parts Repair Service

- Excimer Laser Tube Refurbishment
- HVPS High voltage power supply
- HVPS 802 Series, LC1202 Series
- HHT / KEBA KeTop C50 Repair
- Beam Shutter Repair
- GP CRYO Repair / Refurbishment
- Thyrtron Supply Power Module Repair
- Trigger Board Repair

RichEnergy Technology service and systems for Excimer Laser products, Excimer Laser system, Excimer Laser Applications

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